Highly sensitive Thermopile detector with TO39 industrial standard housing. To achieve a higher sensitivity of the sensor, we use bismuth-antimony alloys. The sensitive component of the Micro-Hybrid TS detectors is a MEMS-based thin-film system on a silicon substrate. The thermocouples themselves consist of a bismuth-antimony / antimony alloy. The detector achieves a detectivity of up to 7.2 x 108 cm x Hz1 / 2 / W and a sensitivity of up to 295 V / W. Sensor chips with 200 (TS 200) thermocouples with different spectral absorber layers, specially designed for NDIR gas analysis are coordinated. The base module consists of a sensitive component and a thermistor that directly reflects the case temperature. It is hermetically sealed with a cap assembly consisting of a broadband infrared filter and a TO cap with aperture in a defined atmosphere.
